Porous Ceramic Vacuum Chuck

Pinnacle Precision supplies a Porous ceramic Chuck Table which is mainly used to support the semiconductor wafer for grinding and dicing. It is applied in the process of dicing, package saw, clearance, transportation, and so on. What exactly are porous ceramics chuck and how are they manufactured? First, a porous ceramics chuck is a piece from a dicing machine, also an important compartment for sawing process to be carried out. Porous ceramic is formed by continuous holes connecting from the inside to the surface like a sponge. While the chucking surface fixes the affixed object with atmospheric pressure by using a vacuum, which functions in the same principle as a suction pad.

A porous ceramic chuck table is used to support and chuck wafers during their production. Our ceramic chuck tables have high flatness up to 2 microns or 0.002 microns and parallelism, uniform compact frame, high strength, good porosity, uniform absorbability, and easy dressing. Our chuck tables are decent, long-lasting, and compatible with sorts of machines made in Japan, Germany, and so on.

Classes of Chuck Table based on Applications：

1. Dicing & Sawing Chucks
2. Cleaning or Washing Chucks
3. Package Sawing Chucks
4. Custom Made Chucks

Our chucks come in round shapes with diameters of 4″,5”,6″& 8”, square, oval shapes, or irregular shapes and sizes. We also provide refurbishing services for old chuck, porous hole clotting, porous crack, or uneven surface. Our new or refurbished porous ceramic chucks can also be used on Disco, ADT, and K&S dicing saws and grinders.

Characteristics and specialty of our Chuck:
 -High flatness and parallelism
 -Compact and uniform microstructure with high strength
 -High permeability and uniform absorption
 -Long lifespan

Compositions of Ceramic Porous are as below:

Types of Chuck: